Annealing behavior of open spaces in AlON films studied by monoenergetic positron beams

作者：Uedono Akira^*; Yamada Takahiro; Hosoi Takuji; Egger Werner; Koschine Toenjes; Hugenschmidt Christoph; Dickmann Marcel; Watanabe Heiji

来源：Applied Physics Letters, 2018, 112(18): 182103.

DOI：10.1063/1.5027257

The impact of nitridation on open spaces in thin AlONx films deposited by a reactive sputtering technique was studied by using monoenergetic positron beams. For AlONx films with x = 0%-15%, positrons were found to annihilate from trapped states in open spaces, which coexist intrinsically in an amorphous structure with three different sizes. Nitrogen incorporation into the Al2O3 film increased the size of the open spaces, and their density increased as the post-deposition annealing temperature increased. The effect of nitrogen incorporation, however, diminished at x = 25%. The observed change in the network structure was associated with the formation of a stable amorphous structure, which we could relate to the electrical properties of AlONx/SiO2/Si gate stacks. Published by AIP Publishing.

• 出版日期2018-4-30