科研之友
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摘要
A small-sized, high momentum rate (>10(-2) N), dynamically actuated microvalve fulfilling the functional specifications for active aerodynamic flow control was designed, fabricated and characterized. The prototype consists of a microfabricated silicon channel pinched by an actuated poly(dimethyl siloxane) (PDMS) polymer membrane. Actuation is provided by coupling an inductive driving coil and a NdFeB permanent magnet fixed on the PDMS elastomeric membrane. The development of a specific microfabrication process, and a complete characterization of the fabricated prototypes are presented in this paper. The yield air microjet performances reach 150 m s(-1) for an actuation frequency situated in the range [0 Hz-400 Hz] and an outlet area of about 1 mm(2). Experimental results also show that the use of a vectoring plate placed at the outlet of the microvalve provided not only easier integration of the microsystem, but also improved the penetration of the microjet into the main flow.
- 出版日期2009-11
