A multifunctional contactless profilometer based on a tunable acousto-optical image filter

作者:Viskovatykh A V*; Machikhin A S; Pozhar V E; Pustovoit V I
来源:Instruments and Experimental Techniques, 2015, 58(1): 114-117.
DOI:10.1134/S0020441215010133

摘要

A contactless complete-field profilometer operating as an optical coherent microscope with the spectral recording is designed. Its special feature is that the spectral selection is carried out in the receiving channel. An acousto-optical image monochromator is used for this purpose. The experimental relief surface data are given.

  • 出版日期2015-1