科研之友
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摘要
This paper studies the fabrication of a novel planar electromagnet consisting of a planar copper coil and a magnetic yoke. CoFeB was used as the magnetic yoke material instead of the traditional permanent magnets. The planar electromagnet was fabricated and optimized to maximize the electromagnetic force, especially with varying CoFeB thickness. The micro-planar electromagnet was fabricated successfully by the traditional microelectro-mechanical-system (MEMS) techniques and XRD, VSM were used to characterize the performance of the electromagnet. The planar electromagnet exhibits superior perpendicular magnetic anisotropy (PMA) and 0.006 emu of Ms was achieved following 2 min deposition of CoFeB thin film. By integrating with other micro apparatuses, it is anticipated that the planar electromagnet will have potential applications in areas such as biosensors, biological medicine, drug delivery, chemical analysis and environmental monitoring.
- 出版日期2017-7-30
- 单位西南交通大学
