Detection of carcinoembryonic antigen using AlN FBAR

作者：Lee Tae Yong; Song Joon Tae^*

来源：Thin Solid Films, 2010, 518(22): 6630-6633.

DOI：10.1016/j.tsf.2010.03.060

• Biosensor
• FBAR
• Protein A
• Protein G
• Carcinoembryonic antigen (CEA)

In this study, we investigated AlN-based film bulk acoustic resonator (FBAR) for the detection of carcinoembryonic antigen(CEA). CEA is a glycoprotein most often associated with breast, colorectal and lung cancer and used to monitor patients with this type of cancer. AlN thin film was deposited on Mo (200 nm)/Ti (10 nm)/Si3N4 (300 nm)/Si (300 mu m)/Si3N4 (300 nm) substrate by reactive RF magnetron sputtering method. Deposited AlN films showed strongly c-axis preferred orientation with main (002) peak as well as the high intensity of 2.50 degrees for FWHM in rocking curve. The FBAR has a resonant frequency of 2.477 GHz and a sensitivity of 3514 Hz cm(2)/ng. To investigate optimal condition of self-assembled monolayer (SAM) and anti-CEA concentration for detecting CEA, protein A and protein G as SAM and anti-CEA concentration from 0.2 to 1.0 mg/ml were adopted.

• 出版日期2010-9-1