摘要

A compact and robust implementation of grating spectrometers on silicon is demonstrated. In the proposed device, two separate mirrors are used in a folded geometry for a smaller device footprint, and a photonic crystal-based reflector is used to improve the robustness against fabrication imperfections. Experimental results show a wavelength resolution of 2.5 nm around the center wavelength of 1560 nm in this device at a chip area of 800 mu m x 480 mu m. Device potentials for use as on-chip spectrometers are also investigated.

  • 出版日期2010-3