科研之友
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摘要
In this letter, we demonstrate a spherical nanocavities fabrication using an "air-molding" method, which is implemented by modulating the pressure difference across an -liquid interfaces in nanoholes on the mold The cavities formation is theoretically considered and experimentally verified at macroscale first, and then a series of expel intents are performed over a patterned surface with sub-300 nm holes by varying the pressure difference by sending a PDMS prepolymer coated mold into a vacuum chamber with changeable pressure Results show that the air-molding method for spherical cavities fabrication is feasible not only at macroscale, but also at the nanoscale when introducing a pressure difference across the air-liquid interface And the cavities shape is easily controlled by modulating the pressure in the vacuum chamber The spherical cavities in this paper have application potential in the optical field and in micio- and nanofluidics
- 出版日期2010-9-21
