Micromachining of commodity plastics by proton beam writing and fabrication of spatial resolution test-chart for neutron radiography

作者：Sakai T^*; Yasuda R; Iikura H; Nojima T; Matsubayashi M; Kada W; Kohka M; Satoh T; Ohkubo T; Ishii Y; Takano K

来源：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , 2013, 306: 299-301.

DOI：10.1016/j.nimb.2012.10.030

• Proton beam writing
• Micromachining
• Acrylic resin
• Neutron radiography

Proton beam writing is a direct-write technique and a promising method for the micromachining of commodity plastics such as acrylic resins. Herein, we describe the fabrication of microscopic devices made from a relatively thick (similar to 75 mu m) acrylic sheet using proton beam writing. In addition, a software package that converts image pixels into coordinates data was developed, and the successful fabrication of a very fine jigsaw puzzle was achieved. The size of the jigsaw puzzle pieces was 50 x 50 mu m. For practical use, a prototype of a line and space test-chart was also successfully fabricated for the determination of spatial resolution in neutron radiography.

• 出版日期2013-7-1