Aiming of Kirkpatrick-Baez microscope based on auxiliary optical system

作者：Huang Shengling^*; Mu Baozhong; Yi Shengzhen; Wang Xin; Wang Zhanshan; Ding Yongkun; Miao Wenyong; Dong Jianjun

来源：High Power Laser and Particle Beams, 2009, 21(6): 841-845.

• Aiming
• Auxiliary optical system
• Depth of field
• Field of views
• Kirkpatrick-Baez
• Kirkpatrick-Baez microscope
• Object location
• Optical path
• Periodic multilayers
• Point positioning
• Precise positioning
• Vertical axis
• Visible imaging
• Visible light
• X ray imaging system
• Xray imaging

An auxiliary optical system has been designed, which can provide precise positioning for aiming Kirkpatrick-Baez(KB) microscope object location. An 8 keV X-ray imaging system by KB microscope with periodic multilayer films has been designed. The field of view and depth of field in the resolution of 5 μm are got, and then the corresponding point and depth of field in diagnostic experiments are calculated. Based on the object-image relations and precision of the KB microscope, an auxiliary visible light imaging system is designed and X-ray imaging experiments are performed, which can achieve equivalent aiming between the visible imaging system and the KB microscope. The results show that ±20 μm vertical axis plane and ±300 μm axial accuracy are achieved through the auxiliary optical path, which can meet the object point positioning requirements of the KB microscope.

• 出版日期2009
• 单位同济大学