Densification study of ITO films during high temperature annealing by GISAXS

作者：Yang, Lili; He, Xiaodong^*; Ge, Dengteng; Wei, Hua

来源：Physica B: Condensed Matter , 2009, 404(16): 2146-2150.

DOI：10.1016/j.physb.2009.04.004

• ITO films
• Densification
• GISAXS
• Pore
• Fractal structure

Three thermal routes were treated on the sol-gel ITO films, i.e. conventional thermal annealing (CTA), rapid thermal annealing (RTA) and thermal cycle annealing (TCA). The near surface and internal structures of films were characterized by grazing incidence small angle X-ray scattering (GISAXS) technique. It is found that slit-like pores show fractal structures laterally and the near surface is sparser with bigger pores. Ordered pore structure normal to the film appears when films are annealed at high heating rate. The shrinkage of pores is mainly owing to structural relaxation and diffusion during the superheating process. However, the supercooling process has no significant effect on the structures. Furthermore, CTA samples have the greatest porosity and surface roughness due to the prevailing crystallization as well as the coarsening procedure. However small pores inside the films are eliminated at low temperature.

• 出版日期2009-8-1
• 单位哈尔滨工业大学