A New Method for Measuring Normal Forces with Accurate Gap Control Using a Microfabricated Quartz Resonator for Lubrication at Nanometer Gaps

作者：Fukuzawa Kenji^*; Yamauchi Yuki; Naito Yusuke; Itoh Shintaro; Zhang Hedong

来源：Tribology Letters, 2011, 43(2): 121-128.

DOI：10.1007/s11249-011-9810-x

• Nanotribology
• Magnetic data storage
• Magnetic data disks (hard, floppy)
• Rheology
• MEMS devices

A new method using a microfabricated quartz double-ended tuning fork (DETF) resonator is presented for simultaneously measuring normal and lateral forces with accurate gap control. The quartz resonator provides high force sensitivity due to its smaller device size. An optical fiber probe for lateral force detection was combined with the resonator by adding a support frame, thereby for increasing lateral rigidity. The normal and lateral forces exerted by a lubricant in nanometer-sliding gaps were simultaneously measured using the quartz DETF resonator with the optical fiber probe. This method is useful for clarifying the tribological properties in small sliding gaps for micro/nano-mechanical devices such as the head-disk interface of hard disk drives.

• 出版日期2011-8