Design of freeform lens with TFMG reflector for UV-LEDs lithography system

作者：Pan, C T^*; Yang, T L; Chen, Y C; Chang, C M; Hsu, J H; Huang, J C

来源：Optik, 2016, 127(17): 6850-6857.

DOI：10.1016/j.ijleo.2016.04.110

• Freeform lens
• Thin film metallic glasses
• Light-emitting diode
• Lithography system
• 3-D printing

A freeform lens with inclined reflector coated with Al-Ni-Y thin film metallic glass (TFMG) was proposed to improve the irradiance and uniformity of an ultraviolet light-emitting diode (UV-LEDs) lithography system. Polydimethylsiloxane (PDMS) was adopted as lens materials. The lens mold was fabricated by 3-D printing method. Besides, a recipe of TFMG with 88% reflectivity was determined to enhance the exposure performance. The results show the average irradiance and uniformity with 60 inclined reflector were 8.7 mW/cm(2) and 82%, respectively. The system with 60 inclined reflector layer can achieve 97.5% average normalized cross correlation (NCC) between the simulation and experimental measurement.

• 出版日期2016
• 单位中山大学