A computational study of the piezoelectric response due to the material effect in periodic, single island thin films and the geometric effect in periodic, bi-island thin films

作者：Liu B; Bhattacharyya A^*

来源：Thin Solid Films, 2010, 518(14): 3844-3852.

DOI：10.1016/j.tsf.2009.12.114

• Piezoelectric effect
• Stress
• Periodic structure
• Thin films

The electromechanical response of a square-periodic array of circular piezoelectric (PE) thin films alternating with non-piezoelectric (NPE) films is studied in this paper. The material effects are studied for four film/substrate combinations in absence of NPE films for which it is found that if d(zxx) << d(zzz), (z-axis being normal to the interfacial plane between the film and the substrate), it results in reduced substrate bending leading to reduced degradation in the electromechanical response of the thin film. The bi-island structure is studied for zinc oxide on strontium titanate, and, in general, it is seen that the NPE films not only reduce degradation of the electromechanical response of the PE films but also increase their internal stresses; the effect on the former is less than the latter. These effects are most prominent when the circular NPE thin films fill the space between the PE thin films and are elastically very stiff compared to the substrate.

• 出版日期2010-5-3