UV-/thermal processing of sol-gel-derived lead-magnesium-niobium titanate thin films

作者：Copuroglu Mehmet^*; O'Brien Shane; Malic Barbara; Kuznik Brigita; Kosec Marija; Zhu Xiaohong; Defay Emmanuel; Winfield Richard

来源：Thin Solid Films, 2010, 518(16): 4503-4507.

DOI：10.1016/j.tsf.2009.12.017

• Ferroelectrics
• Sol-gel method
• UV-irradiation
• Rapid thermal annealing
• Characterisation

This work aimed to describe the sol-gel synthesis and preparation of a near-morphotropic phase boundary lead-magnesium-niobium titanate (PMNT) material system, and to investigate the influences of room-temperature-UV-irradiation and rapid thermal annealing (RTA) processes on the properties of its thin films. It was postulated that the use of UV-irradiation prior to thermal processing could play a role in the generation of a structural difference that would manifest itself via the formation of a higher film thickness, which was more pronounced at higher RTA temperatures The PMNT thin film system described here (particularly those annealed at higher temperatures) appeared to be potentially suitable for ultrahigh-value-capacitor applications; the unexposed film annealed at 750 degrees C exhibited the highest high k value (1425) with a strongly pronounced perovskite phase (97%).

• 出版日期2010-6-1
• 单位中国地震局