Dimensional metrology using the optical comb of a mode-locked laser

作者：Jin Jonghan^*

来源：Measurement Science and Technology, 2016, 27(2): 022001.

DOI：10.1088/0957-0233/27/2/022001

• dimensional metrology
• mode-locked laser
• optical comb

In the field of dimensional metrology, significant technical challenges have been encountered with regard to large-scale object assembly, satellite positioning, control of the long-distance precision stage, and inspections of large steps or deep holes on semiconductor devices and multi-layered display panels. The key elements required are high speeds, a long dynamic measurable range, and good precision of measurements, and conventional methods can scarcely meet such requirements simultaneously. Promisingly, the advent of the optical comb has opened up numerous possibilities to break through practical limits by exploiting several of its unique features. These include inter-mode interference, a wide spectral bandwidth with a long coherence length and well-defined longitudinal modes. In this review, various dimensional metrological methods using the optical comb are introduced, describing their basic principles and applications in scientific as well as industrial areas.

• 出版日期2016-2