摘要

This paper presents the analysis of factors affecting the small wavelength content of profile after measurement by stylus profilometer. Three following factors are considered: the shape and size of stylus tip sampling interval, and short-wavelength cut-off. The effect of mechanical filtration of replica measurement is considered. The influence of skid is also analysed. The real and computer generated random profiles of normal and asymmetrical shapes of the ordinate distribution are the objects of investigation. 2D profiles are analysed, but the effects of tip radius size as well as the skid effect were analysed in three-dimensional surface.

  • 出版日期2004-6