A novel phenomenon: p-Type ZnO:Al films deposited on n-Si substrate

作者：Jin Hu Jie; Song Min Jong; Park Choon Bae^*

来源：Physica B: Condensed Matter , 2009, 404(8-11): 1097-1101.

DOI：10.1016/j.physb.2008.11.078

• Al-doped p-type ZnO
• RF magnetron sputtering
• Oxygen ambient

Al-doped p-type ZnO thin films were fabricated by RF magnetron sputtering on n-Si (10 0) and homo-buffer layers in pure ambient oxygen. ZnO ceramic mixed with 2 wt% Al2O3 was selected as a sputtering target. XRD spectra show that the Al-doped ZnO thin films have a ZnO crystal structure. Hall Effect experiments with Van der Pauw configuration show that p-type carrier concentrations are arranged from 1.66 x 10(16) to 4.04 X 10(18) cm(-3), mobilities from 0.194 to 11.1 cm(2) V-1 s(-1) and resistivities from 0.999 to 18.4 Omega cm. Field emission scanning electron microscopy (FESEM) cross-section images of different parts of a p-type ZnO:Al thin film annealed at 800 degrees C show a compact structure. Measurement of the same sample shows that density is 5.40 cm(-3), smaller than the theoretically calculated value of 5.67 cm(-3). Photoluminescence (PL) spectra at 10 K show a shoulder peak of p-type ZnO film at about 3.117 eV ascribed to electron transition from donor level to acceptor level (DAP).

• 出版日期2009-5-1