Achieving consistency of Young's modulus determination from nanoscale deformation of low-k films

作者：Nagao S^*; Fujikane M; Tymiak N; Nowak R

来源：Journal of Applied Physics, 2009, 105(10): 106104.

DOI：10.1063/1.3117526

• composite materials
• deformation
• elasticity
• low-k dielectric thin films
• nanoindentation
• Young's modulus

The present study proposes a method for determining indenter shape-independent Young's moduli of thin low-k films from a composite film/substrate nanoindentation response. In contrast to the previous models utilizing empirical fitting parameters, the present authors introduce substrate effect factor determined by the elastic film/substrate mismatch, film thickness, and indenter angle. The new method overcomes several deficiencies of the previous models. Such deficiencies include inability to explain/account for the observed difference in the scale of substrate effect sampled by Berkovich and cube corner indenters. The present model provides consistent Young's moduli of 5.8-6.1 GPa for both types of indenters.

• 出版日期2009-5-15