An XPS study of Au alloyed Al-O sputtered coatings

作者：Figueiredo N M^*; Carvalho N J M; Cavaleiro A

来源：Applied Surface Science, 2011, 257(13): 5793-5798.

DOI：10.1016/j.apsusc.2011.01.104

• XPS
• Al2O3-Au
• Au clusters
• Alumina
• Charging effect

The focus of this research is the X-ray photoelectron spectroscopy (XPS) analysis of thin films consisting of Au metal clusters embedded in a dielectric matrix of Al-O coatings. The coatings were deposited by co-sputtering an Al + Au target in a reactive atmosphere with Au contents up to 8 at.%. The Al-O matrix was kept amorphous even after annealing at 1000 degrees C. In the as-deposited films the presence of Au clusters with sizes smaller than 1-2 nm (not detected by XRD) was demonstrated by XPS. With increasing annealing temperature, Au clustering in the dielectric matrix was also confirmed by XPS, in agreement with XRD results.

• 出版日期2011-4-15