Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface

作者：Xie, Jin^*; Liu, Xu-Ran; Wu, Ke-Ke; Li, Ping; Lu, Yong-Xian

来源：Optics and Precision Engineering, 2014, 22(2): 376-382.

DOI：10.3788/OPE.20142202.0376

• Feature profiles
• Machining Accuracy
• Measured points
• Micro-structured surfaces
• Normal orientation
• Orientation measurements
• Structured surfaces
• White-light interferometry

When a White Light Interferometry (WLI) is used to measure the micro-structured surface topography, the measured points on smooth micro-structured surfaces and edges are easy to lose. Therefore, an adaptive-orientation WLI was proposed. The method measured each steep surface along its near normal-orientation for the evaluation of its surface shape, feature profile and micro-machining accuracy. First, a #3000 diamond wheel V-tip was employed to fabricate a micro-pyramid-structure Si surface with a depth of 50 μm and a width of 56 μm. Then, four adaptive-orientation measured point clouds were used to splice and reconstruct whole micro-ground surface. Finally, the micro-ground form error, feature profile error and the feature point error were investigated. Experiments show that the adaptive-orientation measurement can reconstruct integrated micro-pyramid-structured surface and the form error is 5.3 μm, which means that the micro-grinding may assure the machining accuracy of micro-pyramid-structured Si surface. In contrast, the evaluation for the feature profiles and feature points of a micro-pyramid-structure indicates that the feature profile error reaches 7.7 μm, and the feature point error is about 15 μm, which is about 3 times of its form error. It suggests that these errors come from the passivations of diamond wheel V-tip and micro grains.

• 出版日期2014-2
• 单位华南理工大学