Design and characterization of MEMS based micrograsping system

作者：Bazaz Shafaat Ahmed; Abbas Nayyer^*; Saif Muhammad Bilal; Ahmad Nisar

来源：Assembly Automation, 2013, 33(3): 260-271.

DOI：10.1108/AA-12-2013-072

• Design
• Actuators
• Sensors
• Automation
• Electronic engineering

Purpose - This paper aims to present design and characterization of a micrograsping system which is capable of safely grasping micro-objects.
Design/methodology/approach - The proposed micrograsping system consists of novel MEMS based microgripper integrated with capacitive contact sensor (fabricated in standard micromachining process SOI-MUMPs), sense electronics, a controller, high voltage actuation circuit and graphical user interface.
Findings - Due to the improvement in the lateral comb-drive design, the actuator requires low actuation voltages in the range of 0-45 V. This requires a simple and low power actuation circuitry. Capacitive feedback control mechanism is used in the sensor to detect the contact between the jaws and micro-object while providing high values of the capacitance.
Practical implications - The designed sense electronics can sense the capacitance ranging from 0-330 fF. Due to the availability of integrated contact sensor, objects ranging from 54 mu m to 70 mu m can be gripped safely with the applied maximum force of 220 mu N at the tip of the gripper.
Originality/value - The performance of the microgripper, controller algorithm and associated electronics were experimentally quantified through the gripping of 65 mu m sized human hair.

• 出版日期2013