Direct laser writing of microstructures on optically opaque and reflective surfaces

作者：Rekstyte S^*; Jonavicius T; Malinauskas M

来源：Optics and Lasers in Engineering, 2014, 53: 90-97.

DOI：10.1016/j.optlaseng.2013.08.017

• Direct laser writing
• Hybrid polymers
• 3D microstructures
• Opaque surfaces
• Electro conductive surfaces

Direct laser writing (DLW) based on ultra-localized polymerization is an efficient way to produce three-dimensional (3D) micro/nano-structures for diverse applications in science and industry. It is attractive for its flexibility to materialize CAD models out of wide spectrum of materials on the desired substrates. In case of direct laser lithography, photo-crosslinking can be achieved by tightly focusing ultrashort laser pulses to a photo- or thermo-polymers. Selectively exposing material to laser radiation allows creating fully 3D structures with submicrometer spatial resolution. In this paper we present DLW results of hybrid organic-inorganic material SZ2080 on optically opaque and reflective surfaces, such as silicon and various metals (Cr, Ti, Au). Our studies prove that one can precisely fabricate 2D and 3D structures with lower than 1 mu m spatial resolution even on glossy or rough surfaces (surface roughness rms 0.068-0.670 mu m) using sample translation velocities of up to 1 mm/s. Using femtosecond high pulse repetition rate laser, sample translation velocity can reach over 1 mm/s ensuring repeatable submicrometer structuring resolution.

• 出版日期2014-2