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摘要
This paper introduces electromechanical delta-sigma modulators which take mechanical forces as inputs and use micromechanical transducers in the loops. A simulator is developed in which various nonidealities could be modeled. A simulation study on the 2nd and the 3rd-order modulators with single and multi-bit quantization is presented. A novel method called complementary pulse density modulation (CPDM) is proposed to realize linear multi-bit feedback using micro actuators.
- 出版日期2001
