Nanocrystalline SiC film thermistors for cryogenic applications

作者：Mitin V F^*; Kholevchuk V V; Semenov A V; Kozlovskii A A; Boltovets N S; Krivutsa V A; Slepova A S; Novitskii S V

来源：Review of Scientific Instruments, 2018, 89(2): 025004.

DOI：10.1063/1.5024505

We developed a heat-sensitive material based on nanocrystalline SiC films obtained by direct deposition of carbon and silicon ions onto sapphire substrates. These SiC films can be used for resistance thermometers operating in the 2 K-300 K temperature range. Having high heat sensitivity, they are relatively low sensitive to the magnetic field. The designs of the sensors are presented together with a discussion of their thermometric characteristics and sensitivity to magnetic fields. Published by AIP Publishing.

• 出版日期2018-2