Amorphous Ge quantum dots embedded in SiO(2) formed by low energy ion implantation

作者：Zhao J P^*; Huang D X; Chen Z Y; Chu W K; Makarenkov B; Jacobson A J; Bahrim B; Rabalais J W

来源：Journal of Applied Physics, 2008, 103(12): 124304.

DOI：10.1063/1.2927254

Under ultrahigh vacuum conditions, extremely small Ge nanodots embedded in SiO(2), i.e., Ge-SiO(2) quantum dot composites, have been formed by ion implantation of (74)Ge(+) isotope into (0001) Z-cut quartz at a low kinetic energy of 9 keV using varying implantation temperatures. Transmission electron microscopy (TEM) images and micro-Raman scattering show that amorphous Ge nanodots are formed at all temperatures. The formation of amorphous Ge nanodots is different from reported crystalline Ge nanodot formation by high energy ion implantation followed by a necessary high temperature annealing process. At room temperature, a confined spatial distribution of the amorphous Ge nanodots can be obtained. Ge inward diffusion was found to be significantly enhanced by a synergetic effect of high implantation temperature and preferential sputtering of surface oxygen, which induced a much wider and deeper Ge nanodot distribution at elevated implantation temperature. The bimodal size distribution that is often observed in high energy implantation was not observed in the present study. Cross-sectional TEM observation and the depth profile of Ge atoms in SiO(2) obtained from x-ray photoelectron spectra revealed a critical Ge concentration for observable amorphous nanodot formation. The mechanism of formation of amorphous Ge nanodots and the change in spatial distribution with implantation temperature are discussed.

• 出版日期2008-6-15