A 0.13-mu m CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System

作者：Taghvaei M Ali^*; Cicek Paul Vahe; Allidina Karim; Nabki Frederic; El Gamal Mourad N

来源：IEEE Transactions on Circuits and Systems I-Regular Papers, 2013, 60(12): 3136-3144.

DOI：10.1109/TCSI.2013.2265976

• Frequency-to-digital converters
• integrated sensor interface circuits
• resonant vacuum sensors
• MEMS resonators

This paper presents the design of the interface circuit for a novel MEMS-based vacuum measurement system topology. The system is designed to target a vacuum range from 10 to 1200 mbar, providing a theoretical pressure resolution of 2 mbar over the temperature range from -10 degrees C to 60 degrees C. The proposed circuit is designed and fabricated in an IBM 0.13-mu m CMOS process. Measurements show the circuit consumes 62 mu W from a 1.2-V supply, and has a maximum response time of 2 ms. This work is a critical step towards the goal of building a low-power, monolithic, integrated MEMS-based temperature-compensated vacuum measurement system.

• 出版日期2013-12