科研之友
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摘要
We report the successful fabrication of a new silicon photomultiplier (SiPM) with the highest fill factor achieved to date. By utilizing a novel trench structure, a SiPM of 0.5 x 0.5 mm(2) was designed and fabricated. The device consisted of 1024 micropixels, and a 70% fill factor was achieved for each of the 15 x 15 mu m(2) micropixels. The fabricated SiPM showed the desired characteristics for a fast photomultiplying device, namely, a rise time of similar to 2 ns, a gain of 1 x 10(5)-5 x 10(5), and a photon detection efficiency of similar to 10% at the 470nm wavelength. The details of the design, fabrication, and performance characteristics are presented together with the implications for the future development of SiPM-based imaging sensors.
- 出版日期2015-6
