A Novel Film Thermal Converter Based on an Electrothermally Excited/Piezoresistively Detected Microbridge Resonator

作者：Han, Jianqiang^*; Huang, Rongyu; Zhang, Peng; Cheng, Bing; Dong, Lizhen; Han, Dong

来源：IEEE Transactions on Instrumentation and Measurement, 2018, 67(12): 2854-2862.

DOI：10.1109/TIM.2018.2831388

• AC-DC transfer standard
• fast-reversed dc (FRDC) source method
• microbridge resonator
• thermoelectric transfer difference
• thin-film thermal converters

This paper presents the design, fabrication, and preliminary results of a resonant thermal converter consisting of an electrothermally excited/piezoresistively detected SiO2/Si3N4/SixNy microbridge resonator and a Ni24.9Cr72.5Si2.6 heating resistor placed on another beam parallel to the microbridge. The noncontact temperature sensing technique reduces the diversion of thermal energy from the temperature sensors, as well as the ac-dc transfer differences due to the capacitive coupling between the heater and the temperature sensor. The semidigital output of the resonant thin-film thermal converter eliminates problems such as intensity fluctuations associated with analog signals. The temperature coefficient of resistance of the Ni24.9Cr72.5Si2.6 film with a thickness of 89 nm is only -0.86 x 10(-6)/K. The responsivity of the resonant thermal converter is 9.21 kHz . W-1 in air. The thermoelectric transfer difference measured by the fast-reversed dc method at 1 kHz is 2.8x10(-6). It indicates that the resonant thermal converter is a promising thermal converter.

• 出版日期2018-12
• 单位中国计量大学