A Simple and Fast Spline Filtering Algorithm for Surface Metrology

作者:Zhang, Hao*; Ott, Daniel; Song, John; Tong, Mingsi; Chu, Wei
来源:Journal of Research of the National Institute of Standards and Technology, 2015, 120: 129-137.
DOI:10.6028/jres.120.010

摘要

Spline filters and their corresponding robust filters are commonly used filters recommended in ISO (the International Organization for Standardization) standards for surface evaluation. Generally, these linear and non-linear spline filters, composed of symmetric, positive-definite matrices, are solved in an iterative fashion based on a Cholesky decomposition. They have been demonstrated to be relatively efficient, but complicated and inconvenient to implement. A new spline-filter algorithm is proposed by means of the discrete cosine transform or the discrete Fourier transform. The algorithm is conceptually simple and very convenient to implement.