A transmission-line microwave interferometer for plasma electron density measurement

作者：Chang C H; Hsieh C H; Wang H T; Jeng J Y; Leou K C^*; Lin C

来源：Plasma Sources Science and Technology, 2007, 16(1): 67-71.

DOI：10.1088/0963-0252/16/1/009

We present both the theoretical analysis and proof-of-principle experimental results of a novel transmission-line microwave interferometer for measurements of plasma electron density. The principle of this technique is the same as conventional microwave interferometers except that the sensing microwave propagates along a transmission- line structure. For this study, the transmission- line is a circular coaxial dielectric waveguide operated at 2.4 GHz. A microwave module consisting of a microwave source and a phase detector has also been developed for detecting the phase of the microwave propagating through the transmission- line. Good agreement of phase measurements between the microwave module and a microwave network analyser has been demonstrated. The electron density measured by the interferometer is also consistent with the results from a Langmuir probe.

• 出版日期2007-2
• 单位清华大学