Multiphoton polymerization using optical trap assisted nanopatterning

作者：Leitz Karl Heinz^*; Tsai Yu Cheng; Flad Florian; Schaeffer Eike; Quentin Ulf; Alexeev Ilya; Fardel Romain; Arnold Craig B; Schmidt Michael

来源：Applied Physics Letters, 2013, 102(24): 243108.

DOI：10.1063/1.4811704

In this letter, we show the combination of multiphoton polymerization and optical trap assisted nanopatterning (OTAN) for the additive manufacturing of structures with nanometer resolution. User-defined patterns of polymer nanostructures are deposited on a glass substrate by a 3.5 mu m polystyrene sphere focusing IR femtosecond laser pulses, showing minimum feature sizes of lambda/10. Feature size depends on the applied laser fluence and the bead surface spacing. A finite element model describes the intensity enhancement in the microbead focus. The results presented suggest that OTAN in combination with multiphoton processing is a viable technique for additive nanomanufacturing with sub-diffraction-limited resolution.

• 出版日期2013-6-17