Multi-object investigation using two-wavelength phase-shift interferometry guided by an optical frequency comb

作者：Ibrahim Dahi Ghareab Abdelsalam^*; Yasui Takeshi

来源：Applied Physics Letters, 2018, 112(17): 171101.

DOI：10.1063/1.5024244

Two-wavelength phase-shift interferometry guided by optical frequency combs is presented. We demonstrate the operation of the setup with a large step sample simultaneously with a resolution test target with a negative pattern. The technique can investigate multi-objects simultaneously with high precision. Using this technique, several important applications in metrology that require high speed and precision are demonstrated. Published by AIP Publishing.

• 出版日期2018-4-23