A Chemical Vapor Deposition Route to Epitaxial Superconducting NbTiN Thin Films

作者：Tsavdaris Nikolaos; Harza Dibyendu; Coindeau Stephane; Renou Giles; Robaut Florence; Sarigiannidou Eirini; Jacquemin Manoel; Reboud Roman; Hofheinz Max; Blanquet Elisabeth; Mercier Frederic

来源：Chemistry of Materials, 2017, 29(14): 5824-5830.

DOI：10.1021/acs.chemmater.7b00490

The deposition of epitaxial superconducting (Nb,Ti)N thin films is addressed with a new approach, using a chemical vapor deposition technique with in situ production of precursors. Both classic and reactive CVD process are optimized toward (i) the control of crystal structure of the deposited films and (ii) the control of stoichiometry and thus of superconducting properties. Films are chararcterized using thermodynamic, structural, and electrical characterization tools. Precession electron diffraction and electron backscatter diffraction techniques provide the phase and orientation mapping of the films down to the nanometer scale. We demonstrate that the cubic phase (structure with the most prominent superconducting properties) is the thermodynamically stable phase under classic CVD from 800 degrees C up to 1300 degrees C. The hexagonal (Nb,Ti)N is formed via a "nitridation like" process under reactive CVD, up to 1200 degrees C. The composition of the films is controlled by the chemistry of the gas phase, whereas the thickness is regulated down to less than 10 nm due to the low growth rate that can be achieved. This technique allows for the control of the superconducting properties of the films, through the control of Ti composition.

• 出版日期2017-7-25
• 单位中国地震局