An inverse-flow showerhead MOVPE reactor design

作者：Zuo Ran^*; Xu Qian; Zhang Hong

来源：Journal of Crystal Growth, 2007, 298: 425-427.

DOI：10.1016/j.jcrysgro.2006.11.044

• computer simulation
• fluid flow
• mass transfer
• metalorganic vapor phase epitaxy
• showerhead reactor

An inverse-flow showerhead metalorganic vapor phase epitaxy (MOVPE) reactor design is proposed where both inlet and outlet are located on the reactor top, which would transform the original radially distributed reactant concentration into a periodically distributed one around each stagnation point below the showerheads. Thus, the film's uniformities of composition and thickness can be greatly improved. A numerical simulation for the flow behavior in the reactor is conducted. The simulated results of the designed reactor are compared to that of a traditional one and good results are obtained.

• 出版日期2007-1
• 单位江苏大学