New Methods for Series-Resistor Calibrations on Substrates With Losses Up to 110 GHz

作者：Liu Song^*; Orloff Nathan D; Little Charles A E; Lu Xifeng; Booth James C; Ocket Ilja; Lewandowski Arkadiusz; Schreurs Dominique M M P; Nauwelaers Bart K J C

来源：IEEE Transactions on Microwave Theory and Techniques, 2016, 64(12): 4287-4297.

DOI：10.1109/TMTT.2016.2609911

• Calibration
• calibration comparison
• impedance standards
• millimeter wave measurement
• series-resistor
• silicon

We present two new methods to perform series-resistor calibrations on substrates with losses. Lossless calibration substrates, which are required by the traditional calibration comparison technique, are not needed. The proposed methods rely on multiline thru-reflect-line-calibrated series-resistor and series-capacitor data. The first method uses closed-form equations and the second method is based on multifrequency optimization. The proposed methods are based on a fundamental assumption that the resistance and the inductance of series-resistor standards fabricated with thin-film technologies are frequency-independent. In addition, an improved version of the traditional calibration comparison technique is proposed and is used as the benchmark technique. By measurement results on a high-resistivity silicon substrate up to 110 GHz, the validity of the proposed approaches is demonstrated.

• 出版日期2016-12