Development of a CdTe x-ray imaging device driven by a vertical thin film field emission array

作者：Tsunekawa Yuki^*; Nakagawa Masashi; Morii Hisashi; Nagao Masayoshi; Yoshida Tomoya; Kanemaru Seigo; Neo Yoichiro; Aoki Toru; Mimura Hidenori

来源：Journal of Vacuum Science and Technology B, 2010, 28(2): C2D22-C2D25.

DOI：10.1116/1.3318683

• cadmium compounds
• electron field emission
• etching
• field emitter arrays
• II-VI semiconductors
• Schottky diodes
• X-ray imaging

The authors describe a novel CdTe x-ray imaging device that is driven by an electron beam from a field-emitter array. This CdTe x-ray imaging device comprises a CdTe Schottky diode with a vertical thin-film field-emitter array (VTF-FEA). The VTF-FEA was fabricated by an ion-induced bending process and an etch-back technique. The output signal from the detector was obtained through the recombination of x-ray-generated holes and electrons emitted from the VTF-FEA. The output signal clearly depended on the intensity of the x-ray beam. The shape of a Cu plate was successfully detected by the VTF-FEA-driven CdTe diode.

• 出版日期2010-3