A precision alignment control method of linear ultrasonic motors using the normal distribution theory

作者：Zhou Liping^*; Sun Zhijun; Zhang Quan; Guo Yu

来源：Proceedings of the CSEE, 2012, 32(27): 60-65.

• Anti-interference
• Complex dynamics
• Control methods
• Control modes
• Dynamic performance
• Fuzzy logic approach
• High precision positioning
• Large-stroke
• Linear ultrasonic motor
• Positioning error
• Positioning stage
• Precision alignment
• Precision positioning
• Time varying

Linear ultrasonic motors (LUSM), which are widely applied in the field of precision driving, possess the characteristics of a highly non-linearity, time-varying, and complex dynamic model. According to these properties, combined with the technology of fuzzy logic approach, a new control method based on the statistics of the relationship between the diving voltage and the velocity/displacement of the LUSM using the normal distribution theory is supposed to achieve the precision driving of LUSM. The performance of the supposed method is verified by conducting an experiment on a LUSM actuated manipulator. The macro-micro control mode is adopted to realize the requirements of the large-workspace and high precision positioning of the manipulator. The experimental results show that the positioning error is in the (5 nm range when the stroke is 5 mm, the overshoot of the system is greatly inhibited, and the dynamic performance of the system is improved. Moreover, due to the large dynamic thrust of the LUSM, the system also performs good anti-interference ability.

• 出版日期2012
• 单位南京航空航天大学