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摘要
This paper reports a 1-mm(2), two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40degrees), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 X 4 pixel display using this two-dimensional micromirror device has been demonstrated.
- 出版日期2004-6
