Miniature High-Frequency Longitudinal Wave Mass Sensors in Liquid

作者：Zhang Hao^*; Pang Wei; Kim Eun Sok

来源：IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2011, 58(1): 255-258.

DOI：10.1109/TUFFC.2011.1794

In this paper, micromachined longitudinal wave resonant mass sensors operating near 1 GHz in a liquid environment are investigated and characterized. Mass sensitivities of the film bulk acoustic resonator (FBAR) and high-tone bulk acoustic resonator (HBAR) microbalances with small size are measured to be 782.7 cm(2)/g (50 times larger than that of conventional bulky quartz crystal microbalance) and 9.3 cm(2)/g, respectively. Based on the mass sensitivities and frequency noise floor, the minimum detectable mass of the FBAR and HBAR are estimated to be 2.8 ng/cm(2) and 11.9 ng/cm(2) in liquid, respectively.

• 出版日期2011-1
• 单位天津大学