Development of measurement technique for carbon atoms employing vacuum ultraviolet absorption spectroscopy with a microdischarge hollow-cathode lamp and its application to diagnostics of nanographene sheet material formation plasmas

作者：Takeuchi Wakana^*; Sasaki Hajime; Kato Satoru; Takashima Seigo; Hiramatsu Mineo; Hori Masaru

来源：Journal of Applied Physics, 2009, 105(11): 113305.

DOI：10.1063/1.3091279

This study describes the development of a compact measurement technique for absolute carbon (C) atom density in processing plasmas, using vacuum ultraviolet absorption spectroscopy (VUVAS) employing a high-pressure CO(2) microdischarge hollow-cathode lamp (C-MHCL) as the light source. The characteristics of the C-MHCL as a resonance line source of C atoms at 165.7 nm for VUVAS measurements of the absolute C atom density are reported. The emission line profile of the C-MHCL under typical operating conditions was estimated to be the Voigt profile with a Delta nu(L)/Delta nu(D) value of 2.5, where Delta nu(L) is the Lorentz width and Delta nu(D) is the Doppler width. In order to investigate the behavior of C and H atoms in the processing plasma used for the fabrication of two-dimensional nanographene sheet material, measurements of the atom densities were carried out using the VUVAS technique. The H atom density increased with increasing pressure, while the C atom density was almost constant at 5 X 10(12) cm(-3). The density ratio of C to H atoms in the plasma was found to influence the morphology of carbon nanowalls (CNWs). With increasing H/C density ratio, the growth rate decreased and the space between the walls of the CNWs became wider.

• 出版日期2009-6-1