Development of functional sub-100 nm structures with 3D two-photon polymerization technique and optical methods for characterization

作者：Paz V Ferreras^*; Emons M; Obata K; Ovsianikov A; Peterhaensel S; Frenner K; Reinhardt C; Chichkov B; Morgner U; Osten W

来源：Journal of Laser Applications, 2012, 24(4): 042004.

DOI：10.2351/1.4712151

• laser materials processing
• two-photon polymerization
• nanostructures
• subwavelength structures
• sol-gel
• Photosensitive materials
• ultrafast technology
• resolution
• white light interference
• fourier scatterometry
• sensitivity analysis

Investigations of two-photon polymerization (TPP) with sub-100 nm in the structuring resolution are presented by using photosensitive sol-gel material. The high photosensitivity of this material allows for TPP using a large variety in laser pulse durations covering a range between sub-10 fs and approximate to 140 fs. In this study, the authors demonstrate TPP structuring to obtain sub-100 nm in resolution by different approaches, namely, by adding a cross-linker to the material and polymerization with sub-10 fs short pulses. Additionally, a simulation and model based characterization method for periodic sub-100 nm structures was implemented and applied in an experimental white light interference Fourier-Scatterometry setup.

• 出版日期2012-9