Processing of Foturan (R) glass ceramic substrates for micro-solid oxide fuel cells

作者：Toelke R^*; Bieberle Huetter A; Evans A; Rupp J L M; Gauckler L J

来源：Journal of the European Ceramic Society, 2012, 32(12): 3229-3238.

DOI：10.1016/j.jeurceramsoc.2012.04.006

• Foturan (R)
• Photostructurable glass ceramic
• HF etching
• Micro-solid oxide fuel cell
• Micro device

The microfabrication of Foturan (R) glass ceramic as a potential substrate material for micro-solid oxide fuel cells (micro-SOFC) was investigated. Foturan (R) was etched in 10% aqueous hydrofluoric (HF) acid solution at 25 degrees C with a linear rate of 22 +/- 1.7 mu m/min to create structures with an aspect ratio of 1:1 in 500 mu m-thick Foturan (R) substrates for micro-SOFCs. The concentration of the HF etchant was found to influence the etching rate, whereas the UV-exposure time creating nuclei in the glass for subsequent crystallization of the amorphous Foturan (R) material had no significant influence on the etching rates. The surface roughness of the crystallized Foturan (R) was determined by the crystallite size in the order of 10-15 mu m. Free-standing micro-SOFC membranes consisting of a thin film Pt cathode, an yttria-stabilized-zirconia electrolyte and a Pt anode were released by HF etching of the Foturan (R) substrate. An open-circuit voltage of 0.57 V and a maximum power density of 209 mW/cm(2) at 550 degrees C were achieved.

• 出版日期2012-9