Ar or N bombardment induced the microstructure and mechanical properties of ZrB2/W and ZrB2/WNx superlattice coatings prepared by IBAD

作者：Tan M; Wang H Y; Zhang S; Yan J Y; Dong L; Cao M; Li D J^*

来源：Surface and Coatings Technology, 2013, 228: S563-S567.

DOI：10.1016/j.surfcoat.2012.04.014

• Ion beam-assisted deposition
• Multilayer
• Superlattice
• Coherent interface
• Hardness
• Fracture resistance

ZrB2/W and ZrB2/WNx multilayers with modulation periods (Lambda) ranging from 3 to 12.5 nm were prepared under Ar or N bombardment by ion beam assisted deposition. Extensive measurements were employed to investigate the influences of different ion bombardments and modulation periods on microstructure and mechanical properties of the multilayers. A well-defined composition modulation and layer structure with a mixed polycrystalline was proven in the rnultilayers. All of ZrB2/W rnultilayers possessed higher hardness and fracture resistance than monolithic ZrB2 or W coatings. Compared with Ar bombardment, N bombardment gave a further contribution to mechanical properties of ZrB2/WNx multilayers. The maximum hardness and critical load of ZrB2/WNx coating, when A was 9.6 nm and N bombarding energy was 200 eV, were up to 30.2 GPa and 65.5 mN, respectively. This hardest multilayer also showed the improved residual stress. These enhanced effects in ZrB2/WNx coatings were likely the result of the resistance to dislocation glide and columnar grain growth across interface as well as nanoscale strain optimization as the evolution of layer crystalline.

• 出版日期2013-8-15
• 单位天津师范大学