摘要
Simulation has drawn much attention as an analysis tool because it is often the only tool that has the capability of modeling the details of the semiconductor lines. However, building a simulation model of a semiconductor line is time-consuming and error-prone because of the complexity of the line. This paper proposes a generic simulation modeling framework to reduce the simulation model build time. The framework consists of a layout modeling software called AutoLay and a data-driven generic simulation model called AutoLogic. It can be used to develop an integrated simulation model of production processes and material handling processes in a short period of time. Early users of our framework reported that the initial model building time was reduced from two weeks to a half day.
- 出版日期2009-5