An experimental system combined with a micromachine and double-tilt TEM holder

作者：Sato Takaaki^*; Tochigi Eita; Mizoguchi Teruyasu; Ikuhara Yuichi; Fujita Hiroyuki

来源：Microelectronic Engineering, 2016, 164: 43-47.

DOI：10.1016/j.mee.2016.06.018

• MEMS
• TEM
• In-situ observation

An in-situ nanoscale observational and force measurement setup is a significant tool that is necessary for understanding the fundamental properties of materials. We have integrated two actuators and two beams into MEMS device, and then developed an experimental setup which enabled us to tilt the device around two axes and detect applied forces in two directions. To demonstrate the tilting capability, silicon tips made from a (100) wafer were prepared and the diffraction patterns of the specimen were observed, indicating that the observation direction was aligned on the [100] zone axis. Furthermore we successfully observed the peeling of a nano junction at the nano-scale while simultaneously detecting the x and y components of the applied forces in real-time.

• 出版日期2016-10-1