An all solid-state pulsed power generator based on Marx generator

作者：Liu Kefu^*; Qiu Jian; Wu Yifan; Liu Xiaoxu; Xiao Houxiu

来源：16th IEEE International Pulsed Power Conference, 2007-06-17 to 2007-06-22.

High voltage pulsed power supply with high repetitive rate has found wide applications in industry, and military such as plasma source for ion implantation, microwave generator and high pulsed power laser. The conventional pulsed power supply is limited by gas switch with short lifetime and low repetitive frequency. In recent years Marx generator based on solid state switches has proposed. It has dual functions by combining high repetitive rate from semiconductor switch with voltage adder from Marx generator principle. The solid state switches can be MOSFET, IGBT or SCR. This all-solid-state pulsed power supply has multifold advantages such as flexibility of pulse voltage amplitude, pulse width and repetitive rate and long lifetime and compactness.
These advantages make all-solid-state pulsed power supply more attractive then other configuration. This paper describes the operational principle of several topologies of all-solid-state pulsed power supply.
To verify the proposed Marx generator with solid-state switches, a 60kV, 500Hz and 20-100us pulsed power supply was implemented. The experiment results demonstrated the pulsed power supply performance. Some key issues such as high voltage isolation of drive signal and inductor design were discussed in this paper.

• 出版日期2007
• 单位复旦大学