Analysis of atomic force microscopy data for surface characterization using fuzzy logic

作者：Al Mousa Amjed; Niemann Darrell L; Niemann Devin J; Gunther Norman G; Rahman Mahmud^*

来源：Materials Characterization, 2011, 62(7): 706-715.

DOI：10.1016/j.matchar.2011.04.001

• Characterization
• Nanostructures
• Atomic force microscopy
• Fuzzy logic

In this paper we present a methodology to characterize surface nanostructures of thin films. The methodology identifies and isolates nanostructures using Atomic Force Microscopy (AFM) data and extracts quantitative information, such as their size and shape. The fuzzy logic based methodology relies on a Fuzzy Inference Engine (FIE) to classify the data points as being top, bottom, uphill, or downhill. The resulting data sets are then further processed to extract quantitative information about the nanostructures. In the present work we introduce a mechanism which can consistently distinguish crowded surfaces from those with sparsely distributed structures and present an omni-directional search technique to improve the structural recognition accuracy. In order to demonstrate the effectiveness of our approach we present a case study which uses our approach to quantitatively identify particle sizes of two specimens each with a unique gold nanoparticle size distribution.

• 出版日期2011-7