Multilayer high-aspect-ratio RF coil for NMR applications

作者：Hsieh C Y^*; Yeh Y T; Fan L S

来源：Microsystem Technologies, 2011, 17(8): 1311-1317.

DOI：10.1007/s00542-011-1305-z

Microcoils offer a high degree of mass sensitivity and high magnetic field gradient strength in magnetic resonance microscopy applications. This paper presents a novel multilayer high-aspect-ratio metal fabrication process that can be used to fabricate a nanoliter-volume radio frequency (RF) saddle coil with an embedded flow-through fluidic channel for nuclear magnetic resonance (NMR) applications. The fabrication process is based on repeated electroplating processes and structure release processes. The achieved aspect ratio of the developed RF saddle coil is 4 with a structure line width of 25 mu m. The resistance of the RF coil and the (1)H spectrum line width have been measured and are found to be 0.7 Omega and 350 Hz, respectively. Our results indicate that this novel fabrication process for RF microcoils is feasible for NMR applications.

• 出版日期2011-8
• 单位清华大学