摘要

Vertically well-aligned ZnO nanorods arrays were synthesized on sapphire substrates by combining sol-gel method and chemical bath deposition (CBD). The thin ZnO seed layer was coated on sapphire using sol-gel method to control the density and orientation of ZnO nanorods. The structural and morphological properties were characterized by X-ray diffraction spectrometer (XRD) and scanning electron microscopy (SEM) respectively. It demonstrated that the ZnO nanorods were hexangular wurtzite structure and had good crystallinity. Well-aligned and evenly distributed ZnO nanorods in a large scale were obtained, all the ZnO nanorods were preferentially oriented along the c-axis (002) and grown vertically to the substrates. Combining with the Raman scattering and the room temperature photoluminescence (PL), the optical properties are thoroughly studied. At the same time, SEM shows that there are several adjacent rods combine to form aggregation structure, the detail growth mechanism of ZnO nanorods and the new structure is further analyzed.