A Design of Spring Constant Arranged for MEMS Accelerometer by Multi-layer Metal Technology

作者:Yamane Daisuke*; Konishi Toshifumi; Safu Teruaki; Toshiyoshi Hiroshi; Sone Masato; Masu Kazuya; Machida Katsuyuki
来源:11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2016-04-17 to 2016-04-20.

摘要

We report an approach to design spring constant arranged for MEMS accelerometers fabricated by multi-layer metal technology. The proposed multi-layer metal structure can control the spring constant of serpentine flexure to suspend high-density proof mass. Moreover, the multi-layer metal configuration enables us to obtain high degree of freedom of spring constant design without compromising the performance of the MEMS accelerometer. A proof-of-concept device has been fabricated, and the measured characteristics of the proposed micromechanical springs were consistent with the design values.

  • 出版日期2016